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exel
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exel2014-09-02 15:47:112014-09-02 15:47:15“High performance metal gate CMOSFETs with aggressively sacled Hf-based high-k,” ECS Trans. 1, p.609, 2006.
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exel2014-09-02 15:33:252014-09-02 15:33:29 “Impact of metal gate wet etch on device characteristics and reliability for dual metal gate high-k CMOSFETs”, Proc. of IRPS, p.388, 2006.
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exel2014-09-02 15:26:092014-09-02 15:26:19“An Integrable Dual Metal Gate/High-k CMOS Solution for FD-SOI and MuGFET Technologies,” Proc. of IEEE SOI conf., 2005.
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exel2014-09-02 15:20:552014-09-02 15:21:01 “Demonstration of High Performance Transistors with PVD Metal Gate,” Proc. of ESSDERC, 2005.
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exel2014-09-02 15:18:272014-09-02 15:18:29 “Impacts of Si Concentration in Hf-silicate on Performance and Reliability of Metal Gate CMOSFET,” Ext. Abs. of Symp. on Solid State Device and Materials, 2005.
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exel2014-09-02 14:56:162014-09-02 14:56:19“Impact of Plasma Induced Damage on PMOSFETs with Hf-silicate and TiN Gate ,” Proc. of IRPS, p.398, 2005.
