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exel2014-09-02 15:23:312014-09-02 15:23:34“The Effective Work Function of Plasma Injection-Atomic Layer Deposition (PI-ALD) Metal Nitride Electrodes on High-k Dielectric Materials,” AVS ALD symposium, 2005.
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exel2014-09-02 10:05:532014-09-02 10:05:56 "Advanced Integration Technology for a Highly Scalable SOI DRAM with SOC(Silicon-On-Capacitor),” Tech. Dig. of IEDM, p.605,1996
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exel2014-09-02 09:59:442014-09-02 09:59:48 "A Novel Pattern Transfer Process for Bonded SOI Giga-bit DRAMs,” Proceedings of 22nd IEEE International SOI Conference, p.114, 1996.
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exel2014-09-02 09:57:052014-09-02 09:57:08“Post CMP Cleaning for Dielectrically Isolated SOI wafers,” ECS Symposium on Chemical Mechanical Planarization, 1996
