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exel2014-09-02 10:08:252014-09-02 10:08:32"Spectrophotometry and Beam Profile Reflectometry Measurement of Six layers in a SOI Film Stack,” Proceedings of SPIE symposium on Microelectronic Manufacturing, vol. 2877, p.166, 1996
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exel2014-08-29 11:11:552014-08-29 11:12:00"Simultaneous Measurement of Six layers in a Silicon on Insulator Film Stack using Spectrophotometry and Beam Profile Reflectometry,” J. Appl. Phys. 8, p.3570, 1997
