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exel2014-09-02 14:15:592014-09-02 14:16:05 “Effects of NH3 pre-anneal deposition on ALD high-k gate stacks,” Electrochemical Society Symposium, Honolulu, 2004.
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exel2014-09-02 10:57:072014-09-02 10:57:10“ Effect of surface preparation on high-k gate stack performance,” Proceedings of ECS symposium, 2003