https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-03 14:28:172014-09-03 14:31:55 “Triple layer hard mask for gate patterning to fabricate scaled transistor,” US patent No.6800530, 2004