https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:13:302014-09-02 15:13:36“Systematic investigation of amorphous transition-metal-silicon-nitride electrodes for metal gate CMOS applications,” Proc. of VLSI, p.46, 2005.