https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 10:15:582014-09-02 10:16:01 "Study on ZrO2 deposited on Si as an alternative gate dielectric material,” MRS Fall Meeting, 1999