https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 10:08:252014-09-02 10:08:32"Spectrophotometry and Beam Profile Reflectometry Measurement of Six layers in a SOI Film Stack,” Proceedings of SPIE symposium on Microelectronic Manufacturing, vol. 2877, p.166, 1996