https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 10:37:122014-09-02 10:37:15 “ Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high k dielectric film HfO2,” Proc. SPIE - Int. Soc. Opt. Eng. (USA), v.4099, p.228-34, 2000