https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 09:57:052014-09-02 09:57:08“Post CMP Cleaning for Dielectrically Isolated SOI wafers,” ECS Symposium on Chemical Mechanical Planarization, 1996