https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 10:30:522014-09-02 10:30:55"Performance of MOSFETs with ultrathin ZrO2 and Zr silicate gate dieletrics,” Proc. of Symposium on VLSI technology, 2000