“P-Metal Candidate: CVD HfSi Capped with ALD TiN Bi-layer”, ISAGST, 2006. 2014년 9월 2일/카테고리: Conferences /작성자: exel https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif 0 0 exel https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif exel2014-09-02 15:41:002014-09-02 15:41:03“P-Metal Candidate: CVD HfSi Capped with ALD TiN Bi-layer”, ISAGST, 2006.