https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:42:102014-09-02 15:42:13“Opportunities and challenges in ALD processing for advanced gate stack applications”, Proc. of ALD conference, 2006. (Invited)