https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 14:56:162014-09-02 14:56:19“Impact of Plasma Induced Damage on PMOSFETs with Hf-silicate and TiN Gate ,” Proc. of IRPS, p.398, 2005.