https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:32:572014-09-02 15:33:03“Impact of nitrogen on PBTI characteristics of HfSiON/TiN Gate Stacks”, Proc. of IRPS, p.325, 2006.