https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:33:252014-09-02 15:33:29 “Impact of metal gate wet etch on device characteristics and reliability for dual metal gate high-k CMOSFETs”, Proc. of IRPS, p.388, 2006.