https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:28:512014-09-02 15:28:55“Electrical and Reliability characteristics of HfSiO MOSFET annealed in F2 ambient,” SISC, 2005.