https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 14:37:192014-09-02 14:37:22“Effects of TiN Overlayer on ALD TaCN Metal Gate/High-k MOSFET Characteristics,” Proc. of DRC, 2005.