“Effects of NH3 pre-anneal deposition on ALD high-k gate stacks,” Electrochemical Society Symposium, Honolulu, 2004. 2014년 9월 2일/카테고리: Conferences /작성자: exelDownload https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif 0 0 exel https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif exel2014-09-02 14:15:592014-09-02 14:16:05 “Effects of NH3 pre-anneal deposition on ALD high-k gate stacks,” Electrochemical Society Symposium, Honolulu, 2004.