https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 10:43:352014-09-02 10:43:38"Effects of Hf and Zr implanted into Si substrates on the electrical properties of MOS devices,” AIP conference, 2001