https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 14:26:422014-09-02 14:26:51 “Effect of Underlying Dielectric Film on the ALD-TiN film Properties,” 11th Workshop on oxide electronics, 2004