https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 16:16:392014-09-02 16:16:42 “Effect of in situ plasma treatment on high-k films after high-k removal with plasma etching from the S/D region”, Proc. of IRPS, p.672, 2007.