https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:50:572014-09-02 15:51:00“Compatibility of ALD HfSiON with Dual Metal Gate CMOS Integration ”, Ext. Abs. of SSDM, p.1114, 2006.