https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 16:14:052014-09-02 16:15:38“Comparison of Plasma-Induced Damage in SiO2/TiN and HfO2/TiN Gate Stacks,” Proc. of IRPS, p.67, 2007.