https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 11:17:382014-09-02 11:17:41“Comparison of ALD and MOCVD deposition processes for deposition of Hafnium Silicate,” Texas section of American Physical Society conference, 2004