https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 10:34:342014-09-02 10:34:45“Characteristics of TaN gate MOSFET with ultrathin hafnium oxide (8Å-12Å),” Tech Dig. of Int. Electron Device Meetings, p.61, 2000.