https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-02 15:14:302014-09-02 15:14:33“ALD HfO2 thickness dependence on charge trapping characteristics in mobility enhancement,” Proc. of INFOS, p.218, 2005.