https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-09-01 12:59:462014-09-01 12:59:49"Improvement of metal gate/high-k dielectric CMOSFETs characteristics by neutral beam etching of metal gate," Solid State Electronics, 86, p.75-78, (2013).