https://gistexel.com/wp-content/uploads/2014/08/logo_exel.gif00exelhttps://gistexel.com/wp-content/uploads/2014/08/logo_exel.gifexel2014-08-29 14:36:032014-08-29 14:36:23“Evaluation of tantalum silicon alloy system as gate electrodes,” Appl. Phys. Lett. 87, p.212110, 2005